TECHNICAL WHITE PAPER / EXECUTIVE SUMMARY

IPA and NH3 Wastewater Recovery Technology for Semiconductor Fabs

High-efficiency concentration, resource regeneration, and energy-saving solutions tailored for semiconductor fab wastewater containing Isopropanol (IPA) and Ammonia (NH3).
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1. Concentration Performance Metrics
Featuring powerful concentration capabilities, this system significantly reduces off-site waste disposal volume while enhancing the value of recovered materials :
IPA
Isopropanol Recovery
Initial Concentration
1~3 %
→
Treated Concentration
15~20 wt%
NH3
Ammonia Water Recovery
Initial Concentration
0.3 %
→
Treated Concentration
15 %
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2. Core Separation Equipment
Two primary separation technologies can be flexibly configured based on site space constraints and actual requirements, both precisely achieving target concentration purity:
Traditional Distillation Column
A. Traditional Distillation Column
 
✔ Suitable Environments: Standard plant layout and space.
✔ Key Advantages: Highly mature technology, exceptionally stable operation, and outstanding separation precision.
Rotating Packed Bed Concentrator
B. Rotating Packed Bed Concentrator
 
✔ Suitable Environments: Semiconductor fabs with severe space constraints.
✔ Key Advantages: Intensifies gas-liquid mass transfer via high-gravity fields, significantly reducing equipment footprint.
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3. System Processing Capacity

Customizable Capacity per Unit
1 ~ 10 t/h
The system features highly flexible scalability, allowing precise customized engineering tailored to actual wastewater output and production line requirements.
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4. Complex Wastewater Treatment

Equipped with top-tier engineering capabilities for complex water quality, reliably treating mixed wastewater containing both IPA and NH3.
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    Overcomes the limitations of single-component separation.
  • ✔ Eliminates the need for strict front-end stream segregation.
  • ✔ Significantly simplifies facility wastewater piping management complexity.
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5. Energy-Saving Technology

In alignment with green manufacturing initiatives and operational expenditure (OPEX) reduction, advanced heat recovery technologies can be integrated to substantially lower the massive energy consumption required during distillation :
Heat Pump Technology

Heat Pump Technology

 
Recovers system waste heat and converts it into usable thermal energy, effectively improving overall thermal efficiency and reducing reliance on external heat sources.
MVR Technology

Mechanical Vapor Recompression (MVR)

 
Mechanically compresses secondary vapor generated from evaporation to increase its enthalpy, reusing it as a heating source to achieve ultimate energy-saving cycling.
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